Method for welding silicon workpieces
AssigneeIntegrated Materials, Inc.
InventorsRaanan Y. Zehavi, Robert L. Davis, David B. Ackard, James W. Govorko
Life of this patent
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Abstract
A method and apparatus for welding together two silicon workpieces (20, 22) without the formation of cracks along the weld. In a first embodiment, current (34, 36) is passed through one or both of the workpieces to heat them to between 600 and 900° C. Then an electric, laser, or plasma welder (38, 40) passes along the seam (24) between the workpieces to weld them together. In a second embodiment, current (34) is passed through a plate (60), preferably formed of silicon, which either supports the workpieces or is brought into contact with at least one of them, whereby the workpieces are preheated prior to the welding operation.
Claims22
A method of welding together two silicon workpieces, comprising the steps of:
- juxtaposing two silicon workpieces along a seam to be welded;
- heating at least large areas of said workpieces to a heating temperature of at least 600°;
- and
- additionally applying heat to a localized area of at least one of said workpieces adjacent to said seam and included with said large areas to a welding temperature above 1416° C. to weld said workpieces together.
A method of welding together two silicon workpieces, comprising the steps of:
- juxtaposing said two silicon workpieces along a seam to be welded;
- contacting at least one of said workpieces to a heating element;
- passing said current through said heating element to thereby heat said two juxtaposed workpieces to a temperature of at least 600° C.;
- and
- additionally applying heat to a portion of said workpieces adjacent to a localized portion of said seam to weld said workpieces together.
A welding method, comprising the steps of:
- juxtaposing two silicon members to be welded together along a seam;
- physically contacting at least one of said juxtaposed silicon members to a heater plate;
- passing a heating current through said plate to heat said plate to a temperature of at least 600° C. and less than 1416° C.;
- and
- welding said two workpieces together by moving a welding tip along said seam and heating localized areas of said two workpieces.
Dependencies are inferred from the claim text.