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AssigneeAsahi Glass Company, Limited
InventorsNaomichi Miyakawa, Nobuhiro Shinohara, Kanji Arai, Hideo Takahashi
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The present invention provides a silicon nitride filter which is a filter excellent in heat resistance, thermal shock resistance, corrosion resistance, acid resistance and mechanical strength and suitable for dust arresting or dust removing, and which is particularly useful as a filer for particulates, and a method for its production. The present invention provides a method for producing a silicon nitride filter, characterized by heat-treating in nitrogen a green body comprising from 40 to 90% of metal silicon particles having an average particle diameter of from 1 to 200 μm and from 10 to 60% of a pore-forming agent, provided that the total amount of the metal silicon particles and the pore-forming agent is at least 90%, to form a porous product made substantially of silicon nitride. The present invention provides a silicon nitride filter characterized in that the porosity is from 40 to 70%, and the cumulative pore volume of pores with diameters of at most 1 μm is from 1 to 15 vol % of the total pore volume.
A method for producing a silicon nitride filter, characterized by heat-treating in nitrogen a green body comprising from 40 to 90 mass % of metal silicon particles having an average particle diameter of from 1 to 200 μm and from 10 to 60 mass % of a pore-forming agent, provided that the total amount of the metal silicon particles and the pore-forming agent is at least 90 mass %, to form a porous product made substantially of silicon nitride.
A silicon nitride filter characterized in that the porosity is from 40 to 70%, and the cumulative pore volume of pores with diameters of at most 1 μm is from 1 to 15 vol % of the total pore volume.
Dependencies are inferred from the claim text.