Solution treatment method and solution treatment unit
AssigneeTokyo Electron Limited
InventorShuichi Nagamine
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Abstract
The present invention is a solution treatment unit for supplying a treatment solution to a substrate and treating the substrate inside an accommodating vessel, comprising a frame for having the accommodating vessel mounted therein. The accommodating vessel has a structure which enables it to be pulled out in a predetermined direction from the frame. Therefore, the accommodating vessel can be pulled out from the frame at the time of maintenance, which makes it possible to secure sufficient work space for performing the maintenance and to appropriately perform the maintenance operation.
Claims32
A solution treatment unit for supplying a treatment solution to a substrate and treating the substrate inside an accommodating vessel, comprising:
- a frame for having the accommodating vessel mounted therein,
- wherein the accommodating vessel is structured to be pulled out freely in a predetermined direction from said frame.
A solution treatment method for supplying a treatment solution to a substrate and performing solution treatment for the substrate inside a vessel disposed in a casing, comprising the steps of:
- supplying gas from an upper part of the vessel inside the casing;
- adjusting a first flow rate of the supplied gas flowing into the vessel and a second flow rate of the supplied gas flowing out of the vessel;
- and
- exhausting the gas flowing into the vessel and the gas flowing out of the vessel outside the casing.
A solution treatment unit for performing solution treatment for a substrate inside a casing, comprising:
- a vessel provided inside the casing to enclose an outer circumference of the substrate;
- a gas supply section for supplying gas into the casing;
- an exhaust section for collectively exhausting an atmosphere flowing into said vessel and an atmosphere flowing out of said vessel outside the casing;
- and
- an adjusting unit for adjusting a flow rate of gas flowing into said vessel and a flow rate of gas flowing out of said vessel.
Dependencies are inferred from the claim text.