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US 2002/0043937 A1Published application
Magnetron having a lowered oscillation frequency and processing equipment employing the same
AssigneesHitachi, Ltd., Hitachi Electronic Devices Co., Ltd.
InventorsToshio Ogura, Masumi Kuga, Tomokatsu Oguro, Toru Moriike
Life of this patent
Estimating the term…
Abstract
A magnetron has an anode cylinder, a plurality of vanes extending radially inwardly from the anode cylinder, a cathode filament extending along a center axis of the anode cylinder, an output section including an antenna coupled to one of the vanes, and a magnetic circuit section for supplying a magnetic field into the anode cylinder, whereby the magnetron oscillates at a fundamental frequency in a range from 400 MHz to 600 MHz.
Claims8
A magnetron comprising:
- an anode cylinder;
- a plurality of vanes extending radially inwardly from said anode cylinder;
- a cathode filament extending along a center axis of said anode cylinder;
- an output section including an antenna coupled to one of said plurality of vanes;
- and
- a magnetic circuit section for supplying a magnetic field into said anode cylinder,
- whereby said magnetron oscillates at a fundamental frequency in a range from 400 MHz to 600 MHz.
4 more elements
A magnetron comprising:
- an anode cylinder;
- a plurality of vanes extending radially inwardly from said anode cylinder;
- a cathode filament extending along a center axis of said anode cylinder;
- an output section including an antenna coupled to one of said plurality of vanes;
- and
- a magnetic circuit section for supplying a magnetic field into said anode cylinder,
- whereby said output section is provided with a cup-shaped antenna cover forming a part of said antenna, and is adapted to be coupled with a coaxial waveguide by connecting said coaxial waveguide to a conductive antenna block fixed to a bottom of said cup-shaped antenna cover.
4 more elements
Processing equipment comprising:
- a magnetron comprising an anode cylinder, a plurality of vanes extending radially inwardly from said anode cylinder, a cathode filament extending along a center axis of said anode cylinder, an output section including an antenna coupled to one of said plurality of vanes, and a magnetic circuit section for supplying a magnetic field into said anode cylinder, said magnetron oscillating at a fundamental frequency in a range from 400 MHz to 600 MHz;
- and
- a processing section for processing a substance to be processed by using microwaves supplied from said magnetron,
- wherein said output section provides the microwaves to said processing section via a coaxial waveguide.
1 more element
A magnetron comprising:
- an anode cylinder;
- a plurality of vanes extending radially inwardly from said anode cylinder;
- a cathode filament extending along a center axis of said anode cylinder;
- an output section including an antenna coupled to one of said plurality of vanes;
- and
- a magnetic circuit section for supplying a magnetic field into said anode cylinder,
- said magnetron oscillating at a fundamental frequency in a range from 400 MHz to 600 MHz,
- wherein a ratio F/G of an outside diameter F of said cathode filament to a diameter G of a circle tangent to tips of said plurality of vanes satisfies one of the following inequalities:
- 0.44≦F/G≦0.54, when N=8,
- 0.52≦F/G≦0.64, when N=10,
- 0.59≦F/G≦0.73, when N=12, and
- 0.63≦F/G≦0.77, when N=14,
- where N is the number of said plurality of vanes.
10 more elements
Dependencies are inferred from the claim text.