Plastic film electrostatic adsorption apparatus and electrostatic adsorption method

Abstract

The plastic film electrostatic adsorption apparatus and electrostatic adsorption method of the present invention disclose a plastic film electrostatic adsorption apparatus comprising an electrostatic adsorption electrode, an insulated dielectric layer that covers the electrostatic adsorption electrode and has a center line average roughness of the adsorption surface on which the plastic film is placed of 0.5 μm or less, and a power supply electrode that applies a voltage to the electrostatic adsorption electrode. According to this plastic film electrostatic adsorption apparatus and electrostatic adsorption method, surface treatment can be performed even in a vacuum without requiring tedious work such as application or removal of adhesive. In addition, even if the plastic film expands and deforms due to heat treatment and plasma treatment performed during surface treatment, there is no occurrence of wrinkling, deformation of separation in the plastic film due to the difference in thermal expansion between the electrostatic adsorption surface and plastic film.

Dependencies are inferred from the claim text.