Novolac polymer planarization films with high temperature stability
AssigneeHoneywell International Inc.
InventorsNIGEL HACKER, TODD KRAJEWSKI, RICHARD SPEAR
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Abstract
A process for forming a planarization film on a substrate that does not smoke or fume on heating includes applying a polymeric solution including a novolac resin having a weight average molecular weight between about 1000 and 3000 amu, which has been fractionated to remove molecules with molecular weight below about 350 amu, a surfactant selected from a group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof, and an optional organic solvent to a substrate, followed by heating the substrate.
Claims19
A process of forming a planarized film on a substrate comprising:
- applying to a surface of said substrate a polymeric solution comprising a novolac resin having a weight average molecular weight between about 1000 and 3000 amu and wherein the novolac resin is fractionated to remove the molecules with molecular weight below about 350 amu and a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof to form a coated substrate;
- and
- heating said coated substrate to form a planarized film on said surface.
A substrate having a planarized film applied thereon, said film comprising a novolac resin having a weight average molecular weight between about 1000 and 3000 amu and wherein the novolac resin is fractionated to remove the molecules with molecular weight below about 350 amu and a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof.
A composition comprising
- from about 1 to about 90 weight percent of a novolac resin having a weight average molecular weight between about 1000 and 3000 amu and wherein the novolac resin is fractionated to remove the molecules with molecular weight below about 350 amu;
- from about 0.01 to about 5 weight percent of a surfactant selected from the group consisting of a non-fluorinated hydrocarbon, a fluorinated hydrocarbon and combinations thereof;
- and
- from about 0 to about 90 percent of an organic solvent.
Dependencies are inferred from the claim text.