Polishing method and polishing apparatus

A polishing apparatus for polishing a workpiece to be polished, comprising:

• a turntable having a polishing surface thereon;
• a top ring for holding said workpiece to be polished and pressing said workpiece against said polishing surface on said turntable;
• a motor for rotating said turntable;
• and
• a controller for controlling a rotational speed of said motor;
• wherein when said polished workpiece held by said top ring is to be removed from said polishing surface on said turntable, said motor increases a rotational speed of said turntable in comparison with a rotational speed of said turntable at a period of polishing.

A polishing apparatus for polishing a workpiece to be polished, comprising:

• a turntable having a polishing surface thereon;
• a top ring for holding said workpiece to be polished and pressing said workpiece against said polishing surface on said turntable;
• a motor for rotating said top ring;
• and
• a controller for controlling a rotational speed of said motor;
• wherein when said polished workpiece held by said top ring is to be removed from said polishing surface on said turntable, said motor increases a rotational speed of said top ring in comparison with a rotational speed of said top ring at a period of polishing.

A polishing method comprising:

• moving a polishing surface and a top ring for holding a workpiece to be polished relative to each other;
• pressing a surface, to be polished, of said workpiece held by said top ring against said polishing surface to polish said workpiece;
• and
• increasing a relative speed of said polishing surface and said top ring when said polished workpiece held by said top ring is to be removed from said polishing surface, in comparison with a relative speed of said polishing surface and said top ring at a period of polishing.