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US 2002/0002025 A1Published application
Carrier head with a substrate detector
AssigneeChen
InventorsHUNG CHIH CHEN, MICHAEL TSENG, STEVEN M. ZUNIGA
Life of this patent
Estimating the term…
Abstract
A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
Claims14
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower face that provides a substrate receiving surface;
- and
- a valve in the carrier head that forms part of a substrate detection system, wherein the valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower face that provides a substrate receiving surface;
- and
- a valve in the carrier head that forms part of a substrate detection system, wherein the valve includes a valve stem that projects past a support surface, so that if the first chamber is evacuated and a substrate is attached to the lower surface of the flexible membrane, the substrate abuts the support surface and actuates the valve.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower face that provides a substrate receiving surface;
- and
- a plurality of valves in the carrier head that form part of a wafer detection system, wherein if a substrate is attached to the flexible membrane when the first chamber is evacuated, either of the valves may be actuated to generate a signal to the wafer detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower face that provides a substrate receiving surface;
- and
- a plurality of valves in the carrier head that form part of a wafer detection system, wherein if a substrate is attached to the flexible membrane when the first chamber is evacuated, both of the valves must be actuated to generate a signal to the wafer detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower face that provides a substrate receiving surface;
- a second chamber;
- a passage through the base between the first and second chambers;
- a first valve that is biased open and actuates to close the passage if the first chamber is evacuated a substrate is attached to the flexible membrane when the first chamber;
- and
- a second valve connected in series with the first valve, the second valve biased closed and actuatable to open the passage if the second chamber is evacuated.
4 more elements
Dependencies are inferred from the claim text.