Method of manufacturing lapping control sensor for magnetoresistive effect head
AssigneeTDK Corporation
InventorsOsamu Fukuroi, Yoshiro Nakagawa
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Abstract
A lapping control sensor for a MR head includes a multi-layered structure of a metallic layer, an insulation layer, a resister layer and a lead conductor layer, and being provided in parallel with the MR head which has a multi-layered structure of at least a lower shield layer, a shield gap insulation layer, a MR layer and a lead conductor layer is provided. The insulation layer of the lapping control sensor has a thickness larger than that of the shield gap insulation layer of the MR head. The thickness of the insulation layer of the sensor is 0.1 μm or more.
Claims9
A lapping control sensor for a magnetoresistive effect head, said sensor including a multi-layered structure of a metallic layer, an insulation layer, a resister layer and a lead conductor layer, and being provided in parallel with the magnetoresistive effect head which has a multi-layered structure of at least a lower shield layer, a shield gap insulation layer, a magnetoresistive effect layer and a lead conductor layer, said insulation layer of said lapping control sensor having a thickness larger than that of said shield gap insulation layer of said magnetoresistive effect head, the thickness of said insulation layer of said sensor being 0.1 μm or more.
A lapping control sensor for a magnetoresistive effect head, said sensor including a multi-layered structure of a metallic layer, an insulation layer, a resister layer and a lead conductor layer, and being provided in parallel with the magnetoresistive effect head which has a multi-layered structure of at least a lower shield layer, a shield gap insulation layer, a magnetoresistive effect layer and a lead conductor layer, said metallic layer, said insulation layer, said resister layer and said lead conductor layer of said sensor being made of the same material as that of said lower shield layer, said shield gap insulation layer, said magnetoresistive effect layer and said lead conductor layer of said magnetoresistive effect head, respectively, said insulation layer of said lapping control sensor having a thickness larger than that of said shield gap insulation layer, the thickness of said insulation layer of said sensor being 0.1 μm or more.
A method for manufacturing a lapping control sensor comprising the steps of:
- sequentially depositing a metallic layer and an insulation layer at a position in parallel with a magnetoresistive effect head during depositing steps of a lower shield layer and a shield gap insulation layer of said magnetoresistive effect head, said insulation layer of said sensor having a thickness larger than that of said shield gap insulation layer, the thickness of said insulation layer of said sensor being 0.1 μm or more;
- and
- sequentially depositing a resistor layer and a lead conductor layer on said insulation layer during depositing steps of a magnetoresistive effect layer and a lead conductor layer of said magnetoresistive effect head.
Dependencies are inferred from the claim text.