Stepped etalon
AssigneeLucent Technologies Inc.
InventorStephen O'Brien
Life of this patent
Estimating the term…
Abstract
An improved stepped etalon comprises a transparent body having a stepped surface. The lands of the steps are separated by a non-abrupt or softened transition region. This reduces the diffraction of light caused by the step transitions, thereby reducing the dead spot behind the step transition portions where interference prevents accurate measurements of light transmission from being made. Methods for producing a smoothly stepped etalon and for smoothing the step transitions in an abruptly stepped etalon are also disclosed.
Claims17
A stepped etalon comprising:
- a body which is transparent at least in a predetermined range of wavelengths and having first and second opposing sides;
- the first side having a surface;
- the second side having a plurality of steps, each step having a land substantially parallel to the surface,
- the lands of adjacent steps being separated by a non-abrupt transition region.
A stepped etalon comprising:
- a body which is transparent at least in a predetermined range of wavelengths and having first and second opposing sides;
- the first side having a surface;
- the second side having a plurality of steps, each step having a land substantially parallel to the surface,
- the lands of adjacent steps being separated by a transition region;
- a coating substantially transparent to light having a wavelength within said predetermined range applied over said steps and transition regions;
- wherein said coating smooths the transition region between lands of adjacent steps.
A stepped etalon comprising:
- a body which is transparent at least in a first range of wavelengths and having first and second opposing sides;
- the first side having a surface;
- the second side having a plurality of steps, each step having a land substantially parallel to the surface,
- the lands of adjacent steps being separated by a transition region;
- the body having a light-absorbing dopant implanted in said transition regions, said dopant absorbing light having a wavelength within said predetermined range.
A method of producing a stepped etalon having softened step transitions comprising the steps of:
- providing an etalon body which is transparent at least in a first range of wavelengths and having first and second opposing sides;
- depositing a masking material over a first portion of said first side while leaving a second portion of said first side exposed;
- applying a directional abrasive etching beam to said first side at an angle less than ninety degrees relative to said first side for a predetermined amount of time;
- and
- removing said masking material.
A method of producing a stepped etalon having softened step transitions comprising the steps of:
- providing an etalon body which is transparent at least in a first range of wavelengths and having first and second opposing sides;
- depositing an erodible masking material of a predetermined thickness over a first portion of said first side while leaving a second portion of said first side exposed, the first and second portions being separated by a transition region, the masking material having a tail region of gradually decreasing thickness over the transition legion;
- etching said first side and erodible masking material for a predetermined amount of time;
- and
- removing any remaining masking material from the first side.
A method of producing a stepped etalon having softened step transitions comprising the steps of:
- providing an etalon body which is transparent at least in a first range of wavelengths and having first and second opposing sides, said first side having a plurality of steps, adjacent steps separated by a generally abrupt transition region;
- and
- further processing the etalon body to soften the abrupt nature of the transition region.
A method of producing an etalon having a step transition with a reduced degree of unwanted interference comprising the steps of:
- providing an etalon body which is transparent at least in a first range of wavelengths and having first and second opposing sides, said first side having a plurality of steps, adjacent steps separated by a generally abrupt transition region;
- masking the steps on the first side of the etalon body while leaving the transition region substantially exposed;
- and
- doping the exposed transition region with a light-absorbing dopant, said dopant absorbing light having a wavelength within said predetermined range.
Dependencies are inferred from the claim text.