Lens system, in particular projection lens system in semiconductor lithography
AssigneeCarl-Zeiss-Stiftung
InventorKarlfrid Osterried
Life of this patent
Estimating the term…
Abstract
In the case of a lens system, in particular a projection lens system in semiconductor lithography, with a plurality of optical elements, such as lenses, which are mounted in mounts, the mounts being connected to one another, if appropriate by means of adjusting rings, at least one inner mount of an optical element which is intended for removal and/or later fitting is connected to an outer mount by means of a three-point mounting.
Claims20
A lens system with a plurality of optical elements, which are mounted in mounts, the mounts being connected to one another, if appropriate by means of adjusting rings, wherein at least one inner mount of an optical element which is intended for removal and/or later fitting is connected to an outer mount by a three-point mounting.
Dependencies are inferred from the claim text.