Illumination device; and coordinate measuring instrument having an illumination device

An illumination device having

• a light source (1);
• an optical waveguide;
• a coupling-in optical system (3) which couples the light of said light source (1) into a first end of said waveguide;
• a coupling-out optical system (5) which couples out the light emerging from a second end of said optical waveguide;
• and
• an illuminating optical system (17;
• 20) which receives the light emerging from said coupling-out optical system (5) and illuminates an image field,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• and
• b) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), wherein said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from said optical fiber bundle (4),
• c) wherein said homogenizing optical system (6) comprises a microhoney-comb condenser (7) and a lens member (8) which superimpose the exit opening of said fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.

An illumination device having

• a light source (1);
• an optical waveguide;
• a coupling-in optical system (3) which couples the light of said light source (1) into a first end of said waveguide;
• a coupling-out optical system (5) which couples out the light emerging from a second end of said optical waveguide;
• and
• an illuminating optical system (17;
• 20) which receives the light emerging from said coupling-out optical system (5) and illuminates an image field,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• and
• b) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), wherein said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from said optical fiber bundle (4),
• c) wherein the light of said light source (1) is picked off via said coupling-in optical system (3) having a large numerical entrance aperture and is coupled into said optical fiber bundle (4).

An illlumination device having

• a light source (1);
• an optical waveguide;
• a coupling-in optical system (3) which couples the light of said light source (1) into a first end of said waveguide;
• a coupling-out optical system (5) which couples out the light emerging from a second end of said optical waveguide;
• and
• an illuminating optical system (17;
• 20) which receives the light emerging from said coupling-out optical system (5) and illuminates an image field,
• comprising:
• d) an optical fiber bundle (4) which is arranged as said optical waveguide;
• and
• e) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), wherein said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from said optical fiber bundle (4),
• f) wherein the light of said light source (1) is picked off via said coupling-in optical system (3) having a large numerical entrance aperture NA≧0.60 and is coupled into said optical fiber bundle (4).

A coordinate measuring instrument having

• a horizontally X-Y displaceable measurement stage (26) for receiving a substrate with a feature (31) that is to be measured;
• an illumination system with a light source (1), an optical waveguide (4), a coupling-in optical system (3) before the optical waveguide (4), a coupling-out optical system (5) after the optical waveguide (4), and an illuminating optical system (17;
• 20) for illuminating an image field;
• and
• a detector device (14) for determining the position of the feature,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• and
• b) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from the optical fiber bundle (4).

A coordinate measuring instrument having

• a horizontally X-Y displaceable measurement stage (26) for receiving a substrate with a feature (31) that is to be measured;
• an illumination system with a light source (1), an optical waveguide (4), a coupling-in optical system (3) before the optical waveguide (4), a coupling-out optical system (5) after the optical waveguide (4), and an illuminating optical system (17;
• 20) for illuminating an image field;
• and
• a detector device (14) for determining the position of the feature,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• b) a homogenizing optical system (6) which is arranged between the coupling-out optical system (5) and the illuminating optical system (17;
• 20), said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from the optical fiber bundle (4), said homogenizing optical system (6) comprising a micro-honeycomb condenser (6) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image.

A coordinate measuring instrument having

• a horizontally X-Y displaceable measurement stage (26) for receiving a substrate with a feature (31) that is to be measured;
• an illumination system with a light source (1), an optical waveguide (4), a coupling-in optical system (3) before the optical waveguide (4), a coupling-out optical system (5) after the optical waveguide (4), and an illuminating optical system (17;
• 20) for illuminating an image field;
• and
• a detector device (14) for determining the position of the feature,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• b) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from the optical fiber bundle (4).
• c) wherein the light of said light source (1) is picked off via said coupling-in optical system (5) with a large numerical entrance aperture, and is coupled into said optical fiber bundle (4).

A coordinate measuring instrument having

• a horizontally X-Y displaceable measurement stage (26) for receiving a substrate with a feature (31) that is to be measured;
• an illumination system with a light source (1), an optical waveguide (4), a coupling-in optical system (3) before the optical waveguide (4), a coupling-out optical system (5) after the optical waveguide (4), and an illuminating optical system (17;
• 20) for illuminating an image field;
• and
• a detector device (14) for determining the position of the feature,
• comprising:
• a) an optical fiber bundle (4) which is arranged as said optical waveguide;
• d) a homogenizing optical system (6) which is arranged between said coupling-out optical system (5) and said illuminating optical system (17;
• 20), said homogenizing optical system (6) homogenizes the nonuniform intensity distribution in the image field of the light emerging from the optical fiber bundle (4).
• e) wherein the light of said light source (1) is picked off via said coupling-in optical system (5) with a large numerical entrance aperture NA≧0.60, and is coupled into said optical fiber bundle (4).