Part maintenance device of semiconductor processing system and method for operating the same

A part maintenance device of a semiconductor processing system wherein said part is driven by a part driving portion, said part maintenance device comprising:

• a preliminary setting means for preliminarily setting and storing the change with the passage of time (again referred to as ‘time-passage change’ hereinafter) with regard to the normal operation of said part and the allowable limit value levels corresponding to said time-passage change;
• a measurement means for measuring the time-passage change in respect to the actual operation of said part;
• and
• a maintenance judgement means for judging the operation condition of said part by comparing the time-passage change in respect to said actual operation with the allowable limit value levels of the time-passage change in respect of said normal operation.

A method for executing the maintenance of a part which is driven by a part driving portion in a semiconductor processing system, said method comprising the steps of:

• setting the normal operation time of said part and the allowable limit value levels corresponding to said normal operation time;
• measuring the actual operation time of said part;
• and
• comparing the actual operation time of said part as measured with the allowable limit value levels in respect to the normal operation time of said part, thereby executing the judgement with respect to the maintenance of said part.

A method for executing the maintenance of a part which is driven by a part driving portion in a semiconductor processing system, said method comprising the steps of:

• setting the time-passage change in respect to the normal operation of said part and the allowable limit value corresponding thereto;
• measuring the time-passage change in respect to the actual operation of said part;
• and
• comparing the time-passage change in respect to the actual operation of said part as measured with the allowable limit value levels of the time-passage change in respect to the normal operation of said part, thereby executing the judgement with respect to the maintenance of said part.