Cleaning nozzle and cleaning apparatus

A cleaning nozzle comprising:

• an ejection nozzle portion having a minimum diameter portion and a trumpet-shaped portion formed by a curved surface located upstream of said minimum diameter portion, an inclination angle of a tangent to the curved surface progressively decreasing toward said minimum diameter portion;
• a gas ejection port formed along the curved surface and opened to an intermediate part of said trumpet-shaped portion;
• and
• a cleaning liquid ejection port formed inside said gas ejection port;
• whereby a gas is ejected from said gas ejection port at a speed higher than that of a cleaning liquid from said cleaning liquid ejection port to transform the cleaning liquid into droplets and to accelerate them.

A cleaning nozzle comprising:

• a converging-diverging nozzle portion having a minimum diameter portion and a trumpet-shaped portion formed upstream of said minimum diameter portion;
• a gas ejection port formed along said trumpet-shaped portion and opened into an intermediate part of said trumpet-shaped portion;
• and
• a cleaning liquid ejection port formed inside said gas ejection port;
• whereby a gas is ejected at a higher speed than that of a cleaning liquid to transform the cleaning liquid into droplets and the droplets are further accelerated downstream of these ejection ports before being ejected out from the cleaning nozzle.

A cleaning apparatus comprising:

• a cleaning nozzle;
• and
• a pressurized gas flow passage for carrying a pressurized gas flow;
• wherein the pressurized gas flow injected with powder is supplied to the cleaning nozzle where it is mixed with a liquid to form a gas-liquid mixture flow containing the powder, and the gas-liquid mixture flow is applied to an object for cleaning by a delaminating action;
• wherein a small amount of clogging prevention liquid is injected into an intermediate section of the pressurized gas flow passage between a powder injection portion and the cleaning nozzle.