Push-pull type micromachined microwave switch

Abstract

Disclosed is a push-pull type micromachined microwave switch using torsion springs and a lever fabricated using a surface micromachining technique so that it operates at a low operating voltage. The microwave switch includes an insulating base plate, fixed electrodes arranged on the insulating base plate, a plurality of fixed shafts attached to the base plate and adapted to firmly support a plurality of torsion springs, respectively, the torsion springs each connected at one end thereof to an associated one of the fixed shafts, a rotating plate arranged over the fixed electrodes to face the fixed electrodes and connected to respective other ends of the torsion springs, a rotating electrode attached to an upper surface of the rotating plate, a lever connected at one end thereof to the rotating plate, a movable contact electrode attached to a lower surface of the lever at the other end of the lever so that it is firmly supported by the lever, and a transmission line arranged on the base plate so that it faces the movable contact electrode.

Dependencies are inferred from the claim text.