Continuous processing of thin-film batteries and like devices
AssigneeCymbet Corporation
InventorMark Lynn Jenson
Life of this patent
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Abstract
A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
Claims31
A method for making a thin-film device, the method comprising:
- providing a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate's major surface area;
- depositing second layer onto the first layer, wherein the depositing of the second layer includes energizing the second layer without substantially heating the substrate.
A system for making a thin-film device, the system comprising:
- a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate's major surface area;
- a deposition station that deposits a second layer onto the first layer, wherein the deposition station supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
A system for making a thin-film device, the system comprising:
- a substrate-supply station that supplies a substrate having a major surface area, the substrate having a first layer on a first surface area of the substrate's major surface area;
- means for depositing a second layer onto the first layer, wherein the means supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
A system for making a thin-film device, the system comprising:
- a substrate-supply station that supplies a substrate having a major surface area;
- a plurality of deposition stations that deposit layers onto the substrate, wherein the deposition station supplies energy to the layer to aid in layer formation without substantially heating the substrate.
Dependencies are inferred from the claim text.