Alumina particles, production process thereof, composition comprising the particles and alumina slurry for polishing
AssigneeShowa Denko K.K.
InventorsHisao Kogoi, Jun Tanaka, Hayato Yamaya
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Abstract
Alumina particles obtained from aluminum chloride by a gas phase method, the particles being amorphous or transition alumina particles and having an amorphous, γ-, δ- or θ-crystalline form or a mixed form thereof, with primary particles thereof having an average particle diameter of 5 to 100 nm, and secondary particles, resulting from the aggregation of primary particles, having an average particle diameter of 50 to 800 nm.
Claims14
Alumina particles obtained from aluminum chloride by a gas phase method, said alumina having an amorphous form or crystalline form of a transition alumina, with primary particles thereof having an average particle diameter of approximately 5 to 100 nm, and secondary particles, resulting from the aggregation of said primary particles, having an average particle diameter of approximately 50 to 800 nm.
Dependencies are inferred from the claim text.