Step difference detection apparatus and processing apparatus using the same

A step difference detection apparatus comprising:

• illumination means for illuminating an object with a plurality of types of illumination light beams having different characteristics from different directions;
• beam splitting means for splitting a reflected light beam from the object into a plurality of light components in units of types of the illumination light beams using a difference in characteristics of the plurality of types of illumination light beams;
• image sensing means for receiving the plurality of light components split by said beam splitting means and inputting a plurality of images corresponding to the plurality of types of illumination light beams, respectively;
• and
• image processing means for processing the plurality of images input by said image sensing means to detect a step difference on the object.

A step difference detection apparatus comprising:

• illumination means for illuminating a linear region of an object carried in a predetermined carrying direction with a plurality of types of illumination light beams having different characteristics from different directions, the linear region crossing the carrying direction, wherein the plurality of types of illumination light beams illuminate the object from directions to form shadows on the object in a direction crossing the carrying direction;
• beam splitting means for splitting a reflected light beam from the object into a plurality of light components using a difference in characteristics of the plurality of types of illumination light beams;
• image sensing means for receiving the plurality of light components split by said beam splitting means and inputting a plurality of images corresponding to the plurality of types of illumination light beams, respectively;
• and
• detection means for detecting a step difference on the object on the basis of the image input by said image sensing means.