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US 2001/0055112 A1Published application
Reference wavelength light generating apparatus
AssigneeAdvantest Corporation
InventorYasuaki Matsubara
Life of this patent
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Abstract
A reference wavelength light generating apparatus is disclosed in which light emitted from a light source is branched by a light branching unit, one of the branched lights is extracted as a measuring beam and the other is extracted as reference wavelength light by passing through a collimator and an absorbing member and then being reflected by a reflecting member to return to the branching unit.
Claims6
A reference wavelength light generating apparatus comprising:
- a light source for generating light having a predetermined wavelength range;
- an absorbing member for absorbing a predetermined wavelength component from incident light;
- a reflecting member for reflecting any light emitted from said absorbing member in the direction of said absorbing member;
- light branching unit for branching and emitting the light emitted from said light source in both a direction of said absorbing member and a direction different from that of said absorbing member and also branching and emitting the light incident from said absorbing member in both a direction of said light source and a direction different from that of said light source;
- and
- a collimator for converting the light emitted from said light branching unit to said absorbing member side via an optical fiber into parallel rays at the end of said optical fiber and letting them into said absorbing member,
- wherein the light branched from said light branching unit in a direction different from that of said light source is emitted as reference wavelength light and the light branched from said light branching unit in a direction different from said absorbing member is emitted as a measuring beam.
4 more elements
A reference wavelength light generating apparatus comprising:
- a light source for generating light having a predetermined wavelength range;
- an absorbing member for absorbing a predetermined wavelength component from incident light;
- a reflecting member for reflecting any light emitted from said absorbing member in the direction of said absorbing member;
- light branching unit for emitting the light emitted from said light source toward said absorbing member and also branching and emitting the light incident from said absorbing member in both a direction of said light source and a direction different from that of said light source;
- and
- a collimator for converting the light emitted from said light branching unit to said absorbing member side via an optical fiber into parallel rays at the end of said optical fiber and letting them into said absorbing member, wherein the light branched from said light branching unit in a direction different from that of said light source is emitted as reference wavelength light.
3 more elements
Dependencies are inferred from the claim text.