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US 2001/0055046 A1Published application
Liquid-firing head and manufacturing method thereof, ink-jet recording device and micro-actuator
AssigneeRicoh Company, Ltd.
InventorMakoto Tanaka
Life of this patent
Estimating the term…
Abstract
A liquid-firing head includes a nozzle firing a liquid drop; a liquid chamber communicating with the nozzle; a vibration plate which acts as a wall of the liquid chamber; and an electrode facing the vibration plate. The vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through the nozzle. A groove for forming a gap between the electrode and the vibration plate is formed in the electrode.
Claims124
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein a groove for forming a gap between said electrode and said vibration plate is formed in said electrode.
4 more elements
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein a groove for forming a gap between a protection insulating film, formed on said electrode, and said vibration plate is formed in said protection insulating film.
4 more elements
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein:
- a gap spacer part determining a gap between said vibration plate and said electrode comprises the same layer as that of said electrode;
- and
- a groove for forming said gap between said electrode and said vibration plate is formed in said electrode.
7 more elements
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein:
- a groove for forming a gap between said electrode and said vibration plate is formed in said electrode;
- and
- a part of said electrode is used as a gap spacer part determining said gap between said electrode and said vibration plate.
7 more elements
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein:
- said electrode has a protection insulating film on a surface thereof;
- a gap spacer part determining a gap between said vibration plate and said electrode is formed of the laminated film same as an electrode layer comprising said electrode and said protection insulating film formed thereon;
- and
- a groove for forming said gap is formed in said protection insulating film.
8 more elements
A liquid-firing head comprising:
- a nozzle firing a liquid drop;
- a liquid chamber communicating with said nozzle;
- a vibration plate which acts as a wall of said liquid chamber;
- and
- an electrode facing said vibration plate, and
- wherein said vibration plate is deformed by an electrostatic force, and, thereby, the liquid drop is fired through said nozzle, and
- wherein:
- said electrode has a protection insulating film on a surface thereof;
- a groove for forming a gap between said vibration plate and said protection insulating film is formed in said protection insulating film;
- and
- a part of said electrode and said protection insulating film is used as a gap spacer part determining said gap between said vibration plate and said protection insulating film.
8 more elements
A micro-actuator, comprising:
- a vibration plate;
- and
- an electrode facing said vibration plate,
- wherein said vibration plate is displaced by an electrostatic force, and
- wherein one of said electrode and a protection insulating film formed on said electrode has a gap between said vibration plate and said electrode.
2 more elements
A micro-actuator, comprising:
- a vibration plate;
- and
- an electrode facing said vibration plate,
- wherein said vibration plate is displaced by an electrostatic force, and
- wherein a gap spacer part determining a gap between said vibration and said electrode comprises the same layer as one of said electrode and said electrode with a protection insulating film.
2 more elements
Dependencies are inferred from the claim text.