Contact arm and electronic device testing apparatus using the same
AssigneeAdvantest Corporation
InventorsTsuyoshi Yamashita, Toshiyuki Kiyokawa
Life of this patent
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Abstract
A contact arm for bringing ICs to be tested to contact a contact portion, comprises a holding head for holding said electronic devices, a floating mechanism provided between a drive mechanism for moving close to or away from said contact portion and said holding head for supporting said holding head movable about said drive mechanism, a diaphragm cylinder provided between said drive mechanism and said holding head for adjusting a relative pressing pressure from said drive mechanism to said holding head. A plurality of diaphragm cylinders are provided to one holding head.
Claims16
A contact arm for an electronic device testing apparatus for bringing electronic devices to be tested to contact a contact portion, comprising:
- a holding head for holding said electronic devices to be tested;
- a floating mechanism provided between a drive mechanism for moving close to or away from said contact portion and said holding head, for supporting said holding head movable about said drive mechanism;
- a hydrostatic pressure cylinder provided between said drive mechanism and said holding head, for adjusting a relative pressing pressure from said drive mechanism to said holding head.
Dependencies are inferred from the claim text.