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AssigneesHitachi, Ltd., Hitachi Science Systems, Ltd.
InventorsYoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya, Hidetoshi Morokuma
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In order to provide a full-automatic scanning electron microscope which carries out investigation jobs full-automatically from fine adjustment to reviewing, the scanning electron microscope of the present invention has a function of calculating the accuracy of correction after correction of coordinates and displaying it with vectors 39, a function of automatically determining a searching magnification for automatic object detection from the obtained information after correction of coordinates, and a function of calculating the frequency of occurrence of objects or defects and a time required for measurement from the searching magnification and conditions of measurement.
A scanning electron microscope comprising a stage which can move with a specimen on it and a function which moves said stage to new coordinates which are obtained by correcting coordinate values of objects of interest on said specimen which were obtained by another device by a coordinate correcting expression to observe said object of interest:
Dependencies are inferred from the claim text.