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US 2001/0043868 A1Published application
Turbo-molecular pump
AssigneeKoyo Seiko Co., Ltd.
InventorsATSUSHI KUBO, HIROCHIKA UEYAMA
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Abstract
In a turbo-molecular pump, a rotor is supported by a magnetic bearing (3) in a non-contact mode. A pump control section (2) has a magnetic bearing control device (8) with a digital signal operating processor or DSP (7) which is programmable by a software or which can execute a programmed software. The digital signal operating processor (7) performs the control of a heating system, namely, a heater, as well as the control of the magnetic bearing (3).
Claims7
A turbo-molecular pump in which a rotor is supported by a magnetic bearing in a non-contact mode, wherein:
- a pump control section has a digital operating system programmable by a software or capable of executing a programmed software;
- and
- said digital operating system performs the control of a heating system and at least part of other controls.
A turbo-molecular pump comprising:
- a pump body including a rotor, a rotor position detector, a magnetic bearing, a temperature detector and a heater;
- and
- a pump control section including a digital operating system programmable by a software or capable of executing a programmed software, wherein:
- said rotor position detector, said magnetic bearing, said temperature detector and said heater are operatively connected to said pump control section;
- and
- at least said temperature detector and said heater are operatively connected to said digital operating system.
3 more elements
Dependencies are inferred from the claim text.