Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpieces

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a transport unit configured to move along a linear track;
• an arm assembly operatively coupled to the transport unit to move with the transport unit along the track, the arm assembly including a single arm that moves along a lift path, the arm having a medial section, a first extension projecting from one side of the medial section, and a second extension projecting from another side of the medial section, and the medial section of the arm being rotatable about the lift path;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second extension of the arm to rotate about a second rotation axis.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a transport unit configured to move along a linear track;
• an arm assembly operatively coupled to the transport unit to move with the transport unit along the track and to move transverse to the track along a lift path, the arm assembly including an arm actuator and an arm coupled to the arm actuator to rotate about the lift path, and the arm having a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second extension of the arm to rotate about a second rotation axis.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a transport unit having a guide member configured to move along a linear track;
• an arm assembly operatively coupled to the transport unit to move with the transport unit along the track and to move along a lift path transverse to the track, the arm assembly including an arm actuator and an arm, the arm being coupled to the arm actuator to rotate about the lift path, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first section of the arm and spaced apart from the arm by a first distance;
• and
• a second end-effector rotatably coupled to the second section of the arm and spaced apart from the arm by a second distance, the first distance being different than the second distance so that the first and second end-effectors are at different elevations relative to the arm.

A transfer device for handling microelectronic workpieces within an environment of a processing station, comprising:

• a base unit;
• an arm operatively coupled to the base unit to move with the base unit, the arm assembly including a single arm that moves along a lift path, the arm having at least a first section projecting from the lift path;
• and
• a first end-effector and a second end-effector coupled to the arm to rotate about at least one rotation axis that is generally parallel to the lift path, the first end-effector being spaced apart from the arm by a first distance and the second end-effector being spaced apart from the arm by a second distance such that the first and second end-effectors are at different elevations relative to the arm.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a transport unit having a guide member configured to move along a linear track;
• a lift assembly carried by the transport unit;
• an arm assembly including an arm actuator carried by the lift assembly to move along a lift path and an arm, the arm being coupled to the arm actuator to rotate about the lift path, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first section of the arm to rotate about a first rotation axis;
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis;
• and
• a plurality of amplifiers carried by the transport unit, the amplifiers including first amplifier coupled to the lift assembly and a second amplifier coupled to the arm actuator.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a linear track;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit having a guide member slidably coupled to the linear track;
• an arm assembly operatively coupled to the transport unit to move with the transport unit along the linear track, the arm assembly including an arm that moves along a lift path and an arm actuator coupled to the arm, the arm having a medial section coupled to the arm actuator, a first extension projecting from one side of the medial section, and a second extension projecting from another side of the medial section, and the arm actuator rotating the medial section of the arm about the lift path;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second extension of the arm to rotate about a second rotation axis.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a linear track;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to the linear track;
• an arm assembly operatively coupled to the transport unit to move with the transport unit along the track, the arm assembly including an arm actuator and an arm coupled to the arm actuator, the arm actuator rotating the arm about a lift path transverse to the path, and the arm having a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path, and the arm being movable along the lift path to change the elevation of the arm relative to the track;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a linear track;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to linear track;
• an arm assembly including an arm operatively coupled to the transport unit to move with the transport unit along the track and an arm actuator coupled to the arm to rotate the arm about a lift path transverse to the track, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first section of the arm to rotate about a first rotation axis and be spaced apart from the arm by a first distance;
• and
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis and be spaced apart from the arm by a second distance, the first distance being less than the second distance so that the first and second end-effectors are at different elevations.

A transfer device for handling microelectronic workpieces within an environment of a processing machine, comprising:

• a linear track;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit having a guide member slidably coupled to the linear track;
• an arm assembly including an arm operatively coupled to the transport unit to move with the transport unit along the track and an arm actuator coupled to the arm to rotate the arm about a lift path transverse to the track, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first section of the arm to rotate about a first rotation axis;
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis;
• and
• a plurality of amplifiers carried by the transport unit, the amplifiers including an amplifier coupled to the arm actuator.

An apparatus for processing microelectronic workpieces, comprising:

• a cabinet defining an enclosure;
• a first set of processing stations arranged in a first row along one side of the enclosure and a second set of processing stations arranged in a second row along another side of the enclosure;
• a linear track in the cabinet extending between the first and second rows of processing stations;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to the linear track;
• a lift assembly carried by the transport unit;
• an arm assembly including an arm actuator carried by the lift assembly to move along a lift path and an arm, the arm having a medial section coupled to the lift actuator, a first extension projecting from one side of the medial section, and a second extension projecting from another side of the medial section, and the arm actuator rotating the arm about the lift path;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis.

An apparatus for processing microelectronic workpieces, comprising:

• a cabinet defining an enclosure;
• a first set of processing stations arranged in a first row along one side of the enclosure and a second set of processing stations arranged in a second row along another side of the enclosure;
• a linear track in the cabinet extending between the first and second rows of processing stations;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to the linear track;
• an arm assembly including an arm operatively coupled to the transport unit to move with the transport unit along the track and to move along a lift path transverse to the track, the arm assembly including an arm and an arm actuator coupled to the arm to rotate the arm about the lift path, the arm having a first extension projecting from one side of the lift path and a second extension projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first extension of the arm to rotate about a first rotation axis;
• and
• a second end-effector rotatably coupled to the second extension of the arm to rotate about a second rotation axis.

An apparatus for processing microelectronic workpieces, comprising:

• a cabinet defining an enclosure;
• a first set of processing stations arranged in a first row along one side of the enclosure and a second set of processing stations arranged in a second row along another side of the enclosure;
• a linear track in the cabinet extending between the first and second rows of processing stations;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to the linear track;
• an arm assembly including an arm operatively coupled to the transport unit to move with the transport unit along the track and to move along a lift path transverse to the track, the arm assembly including an arm and an arm actuator coupled to the arm to rotate the arm about the lift path, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the arm and spaced apart from the arm by a first distance;
• and
• a second end-effector rotatably coupled to the arm and spaced apart from the arm by a second distance, the first distance being less than the second distance so that the first and second end-effectors are at different elevations.

An apparatus for processing microelectronic workpieces, comprising:

• a cabinet defining an enclosure;
• a first set of processing stations arranged in a first row along one side of the enclosure and a second set of processing stations arranged in a second row along another side of the enclosure;
• a linear track in the cabinet extending between the first and second rows of processing stations;
• and
• a robot unit carried by the track, the robot unit including
• a transport unit slidably coupled to the linear track;
• an arm assembly including an arm operatively coupled to the transport unit to move with the transport unit along the track and to move along a lift path transverse to the track, the arm assembly including an arm and an arm actuator coupled to the arm to rotate the arm about the lift path, and the arm having a first section projecting from one side of the lift path and a second section projecting from another side of the lift path;
• a first end-effector rotatably coupled to the first section of the arm to rotate about a first rotation axis;
• a second end-effector rotatably coupled to the second section of the arm to rotate about a second rotation axis;
• and
• a plurality of amplifiers carried by the transport unit, the amplifiers including an amplifier coupled to the arm actuator.

A transfer device for handling microelectronic workpieces in an environment of a processing machine having a first set of processing stations in a first row and second set of processing stations in a second row, the transfer device comprising:

• means for transporting an arm linearly along a track between the first and second rows;
• means for moving the arm along a lift path transverse to the track to adjust an elevation of the arm;
• means for rotating the arm about the lift path;
• first holding means for holding a first workpiece at a first elevation relative to the arm and rotating the first workpiece relative to the arm, the first holding means being rotatably coupled to the arm;
• and
• second holding means for holding a second workpiece at a second elevation relative to the arm and rotating the second workpiece relative to the arm independently from the first holding means, the second elevation being different than the first elevation, and the second holding means being rotatably coupled to the arm.

A method for processing a microelectronic workpiece in a processing apparatus having a first set of processing stations in a first row and a second set of processing stations in a second row, the method comprising:

• holding a first microelectronic workpiece with a first end-effector carried by an arm;
• holding a second microelectronic workpiece with a second end-effector carried by the arm;
• and
• positioning the first microelectronic workpiece in a first plane a first distance from the arm and positioning the second microelectronic workpiece in a plane a second distance from the arm.