Laser optical apparatus
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
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Abstract
There is provided a structure for reducing optical loss in an optical apparatus (homogenizer) for making the intensity distribution of a laser beam uniform. In a multi-cylindrical lens (a glass substrate having a multiplicity of cylindrical lenses formed thereon) used in a homogenizer, convex cylindrical lenses and concave cylindrical lenses are arranged alternately, and the boundaries between the cylindrical lenses have a smooth structure. This makes it possible to reduce scattering of beams that has occurred at the boundaries between the cylindrical lenses.
Claims1
A laser optical apparatus for forming a laser beam having a linear or rectangular beam shape comprising:
- a homogenizer inserted and used between a laser oscillator and an object to be irradiated, wherein
- at least one multi-cylindrical lens used in said homogenizer comprises a plurality of convex cylindrical lenses and concave cylindrical lenses arranged alternately, and
- one of said convex cylindrical lenses and one of said concave cylindrical lenses adjacent to each other are continuous without having an angle.
Dependencies are inferred from the claim text.