Method and apparatus for testing semiconductor devices
AssigneeFujitsu Limited
InventorsKENJI ITASAKA, TERUMI KAMIFUKUMOTO, YUJI AKASAKI, NOBUO OOYAMA
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AssigneeFujitsu Limited
InventorsKENJI ITASAKA, TERUMI KAMIFUKUMOTO, YUJI AKASAKI, NOBUO OOYAMA
Estimating the term…
A method of testing semiconductor devices includes an adhering step, a position correcting step, and an electrical test step. The adhering step includes adhering either a semiconductor device collective body or a plurality of individual semiconductor devices onto an adhesive tape provided on a tape-holding member, the semiconductor device collective body being constructed by a plurality of semiconductor devices integrated together. The position correcting step includes positioning the semiconductor devices by mounting the tape-holding member on a position correction unit and, using an image processing technique, implementing position recognition and position correction of the semiconductor devices adhered on the adhesive tape. The electrical test step includes implementing an electrical characteristic test on the semiconductor devices positioned in the position correction step by connected the semiconductor devices on a testing contactor.
A method of testing semiconductor devices comprising the steps of:
An apparatus for testing a plurality of individualized semiconductor devices adhered on an adhesive tape provided on a tape-holding member, said apparatus comprising:
Dependencies are inferred from the claim text.