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US 2001/0043073 A1Published application
Prober interface plate
OwnerThomas T. Montoyainventor
Life of this patent
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Abstract
A prober interface plate is formed as a single body of ceramic material. The plate has highly planar surfaces obtained by machining and polishing the ceramic plate.
Claims6
A prober interface plate for holding a probe plate, said prober interface plate being formed of a ceramic material.
Dependencies are inferred from the claim text.