Semiconductor device with a halo structure
AssigneeSamsung Electronics Co., Ltd.
InventorWoo Tag Kang
Life of this patent
Estimating the term…
Abstract
The present invention provides a CMOS process, wherein a halo structure can be fabricated without employing an additional lithographic mask for protecting the transistors of the opposite conductivity during a halo implant. The halo implant has a projected range or depth that lies in the range of an LIP implant or a counter-doping implant in the well containing the transistors of the opposite conductivity. The LIP or counter-doping implant effectively cancels the halo impurities.
Claims16
A method for manufacturing a CMOS integrated circuit that includes a first transistor of a first conductivity in a first well having a second conductivity and a second transistor of said second conductivity in a second well having said first conductivity, said transistors having halo structure, said method comprising:
- performing a punch-through implant of a second conductivity in said first well;
- forming a gate for said first and second transistors;
- performing a halo implant of said first conductivity into said first and second wells, wherein a first projected range of said punch-through implant almost matches a second projected range of said halo implant.
A semiconductor device having a first transistor of a first conductivity and a second transistor of a second conductivity comprising:
- a gate electrode for said first and second transistors;
- a first diffusion layer of said second conductivity with a first doping concentration, said first diffusion layer being aligned with said gate electrode for said first transistor;
- a first gate spacer on sidewalls of said gate electrode for said first transistor;
- a halo region containing halo impurities of said first conductivity for said first and second transistors;
- and
- a punch-through implant region of a second conductivity formed underneath the gate electrode for the first transistor.
Dependencies are inferred from the claim text.