Holography transmission electron microscope
AssigneeJEOL Ltd.
InventorsToshikatsu Kaneyama, Hiromi Nunome, Masaki Takeguchi
Life of this patent
Estimating the term…
Abstract
A holography electron microscope permitting electron holography without limitations on the magnification. An electron biprism is mounted between a system of intermediate lenses and a system of projector lenses. The objective lens and the system of intermediate lenses form a crossover at a given position between intermediate lenses and the electron biprism and, at the same time, focus a magnified image at a certain position between the electron biprism and projector lenses. Since the system of intermediate lenses is made up of three or more stages of lenses, it forms a crossover at a given position and focuses a magnified image at a certain position.
Claims5
A holography electron microscope comprising:
- a transmission electron microscope (TEM) having an illumination system for directing an electron beam onto a specimen, a magnification-and-projection system for magnifying and projecting a TEM image transmitted through the specimen, and an observation/recording device for observing and recording the projected TEM image, said magnification-and-projection system including an objective lens, a system of intermediate lenses, and a system of projector lenses;
- an electron biprism positioned between said system of intermediate lenses and said system of projector lenses;
- and
- wherein the lenses of said magnification-and-projection system closer to the specimen than the electron biprism permit one to set the holography electron microscope to any desired magnification.
A holography electron microscope comprising:
- a transmission electron microscope (TEM) having an illumination system for directing an electron beam onto a specimen, a magnification-and-projection system for magnifying and projecting a TEM image transmitted through the specimen, and an observation/recording device for observing and recording the projected TEM image;
- said magnification-and-projection system consisting of at least one objective lens, three or more stages of intermediate lenses, and two or more stages of projector lenses;
- a magnification-setting means for setting said holography electron microscope to a desired magnification M by adjusting excitation currents supplied to the lenses of said magnification-and-projection system;
- and
- an electron biprism located between said system of intermediate lenses and said system of projector lenses.
A holography electron microscope comprising:
- a transmission electron microscope (TEM) having an illumination system for directing an electron beam onto a specimen, a magnification-and-projection system for magnifying and projecting a TEM image transmitted through the specimen, and an observation/recording device for observing and recording the projected TEM image;
- said magnification-and-projection system consisting of at least one objective lens, a system of intermediate lenses, and a system of projector lenses;
- an electron biprism located between said system of intermediate lenses and said system of projector lenses;
- a magnification-setting means for setting said holography electron microscope to a desired magnification M by adjusting excitation currents supplied to the lenses of said magnification-and-projection system;
- said observation/recording device being capable of recording interference fringes in an interference region thereon;
- said objective lens and said system of intermediate lenses cooperating to provide a first magnification M1 on which spacing between said interference fringes or width of said interference region on said observation/recording device is not dependent;
- said system of projector lenses providing a second magnification M2;
- and
- said magnification M being the product of said first magnification M1 and said second magnification M2 (M=M1×M2).
Dependencies are inferred from the claim text.