Method and apparatus for manufacturing high concentration ozone gas
AssigneeMitsubishi Heavy Industries, Ltd.
InventorsJun Izumi, Akinori Yasutake, Nariyuki Tomonaga, Hiroyuki Tsutaya
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AssigneeMitsubishi Heavy Industries, Ltd.
InventorsJun Izumi, Akinori Yasutake, Nariyuki Tomonaga, Hiroyuki Tsutaya
Estimating the term…
A method and apparatus for manufacturing high concentration ozone gas, characterized by employing a pressure swing adsorbing apparatus having a plurality of adsorbing layers filled with ozone adsorbent, in which the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate. A method and apparatus for manufacturing high concentration ozone gas, characterized by employing a TSA adsorbing system, discharging oxygen concentrated gas at a relatively low temperature from the adsorbing layers, passing purge gas at a relatively high temperature into the adsorbing layers in the desorbing process in an opposite direction of the gas flow in the adsorbing process, and recovering the concentrated ozone gas continuously, in which the ozone adsorbent is one or two or more kinds of above adsorbent, and the gas containing ozone from the ozone generating apparatus is cooled by the oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers in the adsorbing process.
A manufacturing method of high concentration ozone gas, characterized by employing a pressure swing adsorbing apparatus having a plurality of adsorbing layers filled with ozone adsorbent, adsorbing ozone by feeding gas containing ozone at a relatively high pressure into the adsorbing layers in the adsorbing process, and recovering concentrated ozone gas by setting the adsorbing layers of the desorbing process to a relatively low pressure, wherein the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a pressure swing adsorbing apparatus having plural adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a water electrolytic ozone generating apparatus of high pressure, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a compressor and a changeover valve are attached to a lead pipe for feeding gas containing oxygen for connecting the ozone generating apparatus to the adsorbing layers in an adsorbing process, a lead pipe for circulating oxygen concentrated gas flowing out from the adsorbing layers is connected to a hydrogen electrode chamber of the water electrolytic ozone generating apparatus through the changeover valve so as to depolarize the oxygen, a lead pipe for feeding purge gas branched off the lead pipe for circulating oxygen concentrated gas is connected to the adsorbing layers in a desorbing process through a reducing valve and changeover valve, and a control device is provided for changing over all the changeover valves to set the adsorbing layers alternately in the adsorbing process and desorbing process by connecting a lead pipe for recovering ozone to the adsorbing layers in the desorbing process through a changeover valve to recover high concentration ozone gas.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a pressure swing adsorbing apparatus having plural adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a silent discharge ozone generating apparatus of high pressure, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a compressor and a changeover valve are attached to a lead pipe for feeding gas containing ozone for connecting the ozone generating apparatus to the adsorbing layers in an adsorbing process, a lead pipe for circulating oxygen concentrated gas at a relatively high pressure flowing out from the adsorbing layers is connected to a lead pipe for feeding oxygen material of the silent discharge ozone generating apparatus through the changeover valve, a lead pipe for feeding purge gas branched off the lead pipe for circulating oxygen concentrated gas is connected to the adsorbing layers in a desorbing process through a reducing valve and changeover valve, and a control device is provided for changing over all the changeover valves to set the adsorbing layers alternately in the adsorbing process and desorbing process by connecting a lead pipe for recovering ozone to the adsorbing layers in the desorbing process through a changeover valve to recover high concentration ozone gas.
A manufacturing method of high concentration ozone gas, using two or more adsorbing layers filled with ozone adsorbent, employing a temperature swing adsorbing system for transferring the adsorbing layers from an adsorbing process at a relatively low temperature to a desorbing process at a relatively high temperature, and further returning to the adsorbing process, precooling the gas containing ozone from an ozone generating apparatus and feeding into the adsorbing layers in the adsorbing process, discharging oxygen concentrated gas at a relatively low temperature from the adsorbing layers, passing purge gas at a relatively high temperature into the adsorbing layers in the desorbing process in an opposite direction of the gas flow in the adsorbing process, and recovering the concentrated ozone gas continuously, wherein the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, and the gas containing ozone from the ozone generating apparatus is cooled by the oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers in the adsorbing process.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a temperature swing adsorbing apparatus having plural adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a water electrolytic ozone generating apparatus, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a heat exchanger, a cooler and a changeover valve are attached to a lead pipe for feeding gas containing ozone for connecting the ozone generating apparatus to the adsorbing layers in an adsorbing process, a lead pipe for circulating oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers is connected to the heat exchanger through the changeover valve, the gas containing ozone is precooled by the oxygen concentrated gas at relatively low temperature in the heat exchanger, the outlet side of the oxygen concentrated gas at a relatively low temperature of the heat exchanger is connected to a hydrogen electrode chamber of the water electrolytic ozone generating apparatus through a lead pipe, the oxygen concentrated gas at a relatively low temperature is supplied into the hydrogen electrode chamber to encourage the oxygen depolarization action, a lead pipe for feeding purge gas is branched off from the lead pipe for circulating the oxygen concentrated gas at a relatively low temperature, and is connected to the adsorbing layers in a desorbing process, a heater and a changeover valve are attached to the lead pipe for feeding purge gas to supply the oxygen concentrated gas at relatively low temperature to the adsorbing layers as heating purge gas, the other end of the adsorbing layers in the desorbing process is connected to a lead pipe for recovering high concentration ozone gas through the changeover valve, and all the changeover vales are changed over simultaneously to use the adsorbing layers alternately in the adsorbing process and desorbing process.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a merry-go-round type temperature swing adsorbing apparatus having three or more adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a water electrolytic ozone generating apparatus, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a lead pipe for feeding gas containing ozone from the ozone generating apparatus and a lead pipe for circulating oxygen concentrated gas can be connected before and after the adsorbing layers in an adsorbing process, a lead pipe for feeding heating purge gas and a lead pipe for recovering high concentration ozone gas can be connected before and after the adsorbing layers in a desorbing process, a lead pipe for feeding cooling gas branched off from the lead pipe for circulating the oxygen concentrated gas and a lead pipe for recovery of the cooling gas can be connected before and after the adsorbing layers in a cooling process, the adsorbing process, desorbing process and cooling process are transferred sequentially by rotating the merry-go-round composed of the adsorbing layers, a heat exchanger and a cooler are attached to the lead pipe for feeding gas containing ozone, the lead pipe for circulating oxygen concentrated gas is connected to the heat exchanger, the gas containing ozone is precooled by the oxygen concentrated gas at relatively low temperature flowing out from the adsorbing layers in the adsorbing process, and is further cooled to the adsorbing temperature by the cooler, the outlet side of the oxygen concentrated gas at a relatively low temperature of the heat exchanger is connected to a hydrogen electrode chamber of the water electrolytic ozone generating apparatus through a lead pipe, and the oxygen concentrated gas at a relatively low temperature is supplied into the hydrogen electrode chamber to encourage the oxygen depolarization action.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a temperature swing adsorbing apparatus having plural adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a silent discharge ozone generating apparatus, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a heat exchanger, a cooler and a changeover valve are attached to a lead pipe for feeding gas containing ozone for connecting the ozone generating apparatus to the adsorbing layers in an adsorbing process, a lead pipe for circulating oxygen concentrated gas at a relatively low temperature flowing out from the adsorbing layers is connected to the heat exchanger through a changeover valve, the gas containing ozone is precooled by the oxygen concentrated gas at a relatively low temperature in the heat exchanger, the outlet side of the oxygen concentrated gas at a relatively low temperature of the heat exchanger is connected to the oxygen material supply side of the silent discharge ozone generating apparatus through a lead pipe so as to recycle the oxygen concentrated gas, a lead pipe for feeding purge gas is branched off from the lead pipe for circulating oxygen concentrated gas at a relatively low temperature and is connected to the adsorbing layers in a desorbing process, a heater and a changeover valve are attached to the lead pipe for feeding purge gas so that the oxygen concentrated gas at a relatively low temperature may be supplied to the adsorbing layers as heating purge gas, other end of the adsorbing layers in the desorbing process is connected to a lead pipe for recovering high concentration ozone gas through the changeover valve, and all the changeover valves are changed over simultaneously to use the adsorbing layers alternately in the adsorbing process and desorbing process.
A manufacturing apparatus of high concentration ozone gas, comprising an ozone generating apparatus, and a merry-go-round type temperature swing adsorbing apparatus having three or more adsorbing layers filled with ozone adsorbent, wherein the ozone generating apparatus is a silent discharge ozone generating apparatus, the ozone adsorbent is one or two or more kinds of adsorbent selected from the group consisting of high silica pentasyl zeolite, dealuminized fogersite, and mesoporous silicate, a lead pipe for feeding gas containing ozone from the ozone generating apparatus and a lead pipe for circulating oxygen concentrated gas can be connected before and after the adsorbing layers in an adsorbing process, a lead pipe for feeding heating purge gas and a lead pipe for recovering high concentration ozone gas can be connected before and after the adsorbing layers in a desorbing process, a lead pipe for feeding cooling gas branched off from the lead pipe for circulating the oxygen concentrated gas and a lead pipe for recovery of the cooling gas can be connected before and after the adsorbing layers in a cooling process, the adsorbing process, desorbing process and cooling process are transferred sequentially by rotating the merry-go-round composed of the adsorbing layers, a heat exchanger and a cooler are attached to the lead pipe for feeding gas containing ozone, the lead pipe for circulating oxygen concentrated gas is connected to the heat exchanger, the gas containing ozone is precooled by the oxygen concentrated gas at relatively low temperature flowing out from the adsorbing layers in the adsorbing process, and is further cooled to the adsorbing temperature by the cooler, and the outlet side of the oxygen concentrated gas at a relatively low temperature of the heat exchanger is connected to oxygen material supply side of the silent discharge ozone generating apparatus through a lead pipe so that the oxygen concentrated has can be recycled.
Dependencies are inferred from the claim text.