Apparatus for manufacturing micro-structure

A manufacturing method of micro-structures comprising a first step for forming a plurality of thin films having prescribed two-dimensionally patterned forms on a substrate, and a second step for forming the micro-structure by laminating and bonding said plurality of thin films on a stage.

A manufacturing method of micro-structures comprising;

• a first step for forming a plurality of first thin films having a prescribed two-dimensional pattern on a substrate, and forming a plurality of second thin films composed of different material from that of said first thin films and having the same film thickness as said first thin film around said plurality of first thin films to form a plurality of composite thin films composed of said first thin films and said second thin films,
• a second step for forming a laminate including a micro-structure by separating said plurality of composite thin films from said substrate and subsequently by laminating and bonding said plurality of composite thin films on a stage, and
• a third step for removing said first thin films or said second thin films out of said laminate to obtain said micro-structure.

A manufacturing apparatus of micro-structures provided with a substrate holder on which a substrate having a plurality of thin films are formed thereon having a prescribed two-dimensional pattern provided in a vacuum chamber, a stage disposed facing said substrate holder in said vacuum chamber for supporting a three-dimensional structure formed by laminating said plurality of thin films, moving means for transferring at least either of said substrate holder and said stage to position said stage successively on said plurality of thin films, and control means for controlling said moving means to separate said plurality of thin films from said substrate, to laminate and bond said plurality of thin films on said stage so as to form a micro-structure.