Triaxial angular rate and acceleration sensor

A structure adapted for use in a triaxial angular rate and acceleration sensor comprising:

• a first set of coplanar accelerometers formed in a first generally planar substrate, each of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another;
• a second set of coplanar accelerometers formed in a second generally planar substrate, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel;
• connecting means for connecting said first and second sets of accelerometers to one another to allow said accelerometers of said first and second sets of accelerometers to dither at the same frequency.

A method for altering response characteristics of an accelerometer wherein said accelerometer includes a sensor frame formed in a substrate, a pendulum formed in said substrate, and an elastic suspension connecting said pendulum to said sensor frame, said method comprising the step of disposing a material over said pendulum, said material having a density that differs from the density of said substrate.

A sensor structure adapted for use in a triaxial angular rate and acceleration sensor comprising:

• a first sensor stack including a first generally planar substrate, said first substrate having a first set of coplanar accelerometers formed therein, each accelerometer of said first set of accelerometers having a sensing axis canted at an angle with respect to the plane of said first substrate, said first set of accelerometers being arranged in the plane of said first substrate to place said sensing axes of said first set of accelerometers skewed to one another;
• a second sensor stack including a second generally planar substrate, said second substrate including a second set of coplanar accelerometers formed therein, each of said second set of accelerometers having a sensing axis canted at an angle with respect to the plane of said second substrate, said second set of accelerometers being arranged in the plane of said second substrate to place said sensing axes of said second set of accelerometers skewed to one another, each of said second set of accelerometers being paired with a corresponding accelerometer of said first set of accelerometers, corresponding accelerometer pairs having sensing axes that are parallel or anti-parallel;
• means for linking said first and second stacks so that said first and second sets of accelerometers dither at the same frequency.

A sensor structure comprising:

• a first accelerometer formed in a first planar substrate and disposed in a first plane, said first accelerometer having a sensing axis;
• a second accelerometer formed in a second planar substrate and disposed in a second plane that is generally parallel to said first plane, said second accelerometer having a sensing axis that is aligned with and anti-parallel or parallel with said sensing axis of said first accelerometer;
• means for linking said first and second accelerometers so that movement of said first accelerometer in said first plane causes a corresponding movement of said second accelerometer in said second plane.