Method of working piezoelectric substance and method of manufacturing composite piezoelectric substance
AssigneeOlympus Optical Co., Ltd.
InventorsMasayoshi Esashi, Takashi Abe, Katsuhiro Wakabayashi
Life of this patent
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Abstract
A method of working a piezoelectric substance, which comprises the steps of, forming, on one surface of a piezoelectric block, an etching mask having an aperture which defines a boundary region between a first piezoelectric segment to be removed, and a second piezoelectric segment to be left remained, forming, on the opposite surface of the piezoelectric block, a sacrificial layer which corresponds to the first piezoelectric segment to be removed and the boundary region, etching the piezoelectric block in the boundary region to reach the sacrificial layer, and eliminating the sacrificial layer to remove the first piezoelectric segment.
Claims19
A method of working a piezoelectric substance, which comprises the steps of;
- forming, on one surface of a piezoelectric block, an etching mask having an aperture which defines a boundary region between a first piezoelectric segment to be removed, and a second piezoelectric segment to be left remained,
- forming, on the opposite surface of said piezoelectric block, a sacrificial layer which corresponds to said first piezoelectric segment to be removed and said boundary region,
- etching said piezoelectric block in said boundary region to reach said sacrificial layer, and
- eliminating said sacrificial layer to remove said first piezoelectric segment.
A method of manufacturing a composite piezoelectric substance, which comprises the steps of;
- forming, on one surface of a piezoelectric block, an etching mask having an aperture which defines a boundary region between a first piezoelectric segment to be removed, and a second piezoelectric segment to be left remained,
- forming, on the opposite surface of said piezoelectric block, an sacrificial layer which corresponds to said first piezoelectric segment to be removed and said boundary region,
- etching said piezoelectric block in said boundary region to reach said sacrificial layer, and
- eliminating said sacrificial layer to remove said first piezoelectric segment,
- filling at least partially a space formed by the removal of said first piezoelectric segment with an organic material, and
- forming, on said one surface and said opposite surface of said piezoelectric block, electrodes for driving said second piezoelectric segment left remained.
Dependencies are inferred from the claim text.