Carrier head with a flexible membrane for a chemical mechanical polishing system

A carrier head for use in a chemical mechanical polishing system, comprising:

• a flange attachable to a drive shaft;
• a base;
• a flexible member connected to the base and defining a chamber, a lower surface of the flexible member providing a substrate receiving surface;
• and
• a gimbal pivotally connecting the flange to the base, the gimbal including an inner race connected to the base, an outer race connected to the flange to define a gap therebetween, and a plurality of bearings located in the gap.

An assembly for use in a chemical mechanical polishing system, comprising:

• a drive shaft;
• a coupling slidably connected to the drive shaft;
• a carrier head secured to a lower end of the drive shaft to rotate with the drive shaft;
• a vertical actuator coupled to an upper end of the drive shaft to control the vertical position of the drive shaft and the carrier head;
• and
• a motor coupled to the coupling to rotate the coupling to transfer torque to the drive shaft.

A carrier head assembly for use in a chemical mechanical polishing system, comprising:

• a drive shaft;
• a first ball bearing assembly laterally securing an upper end of the drive shaft;
• a second ball bearing assembly laterally securing a lower end of the drive shaft;
• and
• a carrier head connected to the lower end of the drive shaft by a gimbal, the gimbal permitting the carrier head to pivot with respect to the drive shaft, wherein a distance between the first ball bearing assembly and the second ball bearing assembly is sufficient to substantially prevent lateral forces transferred through the gimbal from pivoting the drive shaft.

A carrier head for use in a chemical mechanical polishing system, comprising:

• first, second and third independently pressurizable chambers;
• a flexible inner member associated with the first chamber to apply a first pressure to a central portion of a substrate;
• a substantially annular flexible middle member associated with the second chamber and surrounding the inner member to apply a second pressure to a middle portion of the substrate;
• and
• a substantially annular flexible outer member associated with the third chamber and surrounding the middle member to apply a third pressure to an outer portion of the substrate, wherein the outer member is substantially narrower than the middle member.