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US 2001/0041406 A1Published application
Method of producing electrodes of a micromechanical or microelectronic device
OwnerBernd Goebel, Martin Gutscheinventors
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Abstract
A method for producing electrodes in a micromechanical or microelectronic device, includes the steps of producing a shape-imparting supporting structure in or on a substrate; enlarging the surface of the shape-imparting supporting structure; and molding the electrodes, using the enlarged-surface, shape-imparting supporting structure.
Claims24
A method of producing electrodes in one of a micromechanical device and a microelectronic device, the method which comprises:
- producing a shape-imparting supporting structure on a substrate;
- enlarging a surface of the shape-imparting supporting structure for providing an enlarged-surface, shape-imparting supporting structure;
- and
- molding electrodes by using the enlarged-surface, shape-imparting supporting structure.
1 more element
Dependencies are inferred from the claim text.