Semiconductor wafer dividing method
AssigneeDisco Corporation
InventorsSatoshi Tateiwa, Mirei Toida
Life of this patent
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Abstract
A method of dividing a semiconductor wafer of which the surface has a plurality of chips sectioned by streets, into individual chips, characterized in that it comprises a scribing step in which division guide lines are formed by drawing scribed lines along the streets on the surface of the semiconductor wafer, a tape sticking step in which a tape is stuck onto the surface having the division guide lines formed thereon, of the semiconductor wafer, and a back surface cutting step in which cutting grooves are formed in the back surface, to which the tape is stuck, of the semiconductor wafer such that a bit of uncut portions are left along the division guide lines.
Claims4
A method of dividing a semiconductor wafer, of which the surface has a plurality of chips sectioned by streets, into individual chips, characterized in that said method comprises:
- a scribing step in which division guide lines are formed by drawing scribed lines along the streets on the surface of said semiconductor wafer;
- a tape sticking step in which a tape is stuck onto the surface having said division guide lines formed thereon, of said semiconductor wafer;
- and
- a back surface cutting step in which cutting grooves are formed in the back surface, to which said tape has been stuck, of said semiconductor wafer such that a bit of uncut portions are left along said division guide lines, and:
- by the formation of said cutting grooves, said uncut portions are completely separated with the aid of said division guide lines to divide said semiconductor wafer into individual chips.
A method of dividing a semiconductor wafer, of which the surface has a plurality of chips sectioned by streets with a metal layer formed thereon, into individual chips, characterized in that the method comprises:
- a scribing step in which division guide lines are formed by drawing scribed lines along streets on the surface of said semiconductor wafer;
- a tape sticking step in which a tape is stuck onto the surface having said division guide lines formed thereon, of said semiconductor wafer;
- and
- a back surface cutting step in which cutting grooves are formed in the back surface, to which said tape has been stuck, of said semiconductor wafer such that a bit of uncut portions are left along said division guide lines, and:
- by the formation of said cutting grooves, said uncut portions are completely separated with the aid of said division guide lines to divide said semiconductor wafer into individual chips.
Dependencies are inferred from the claim text.