Method for manufacturing a liquid crystal display device
AssigneeLG Electronics Inc.
InventorSUNG JOON BAE
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Abstract
A method for manufacturing an LCD including at least two stacked thin layers in which the upper thin film smoothly and completely covers the lower thin film includes the steps of coating a photo-resist on a patterned layer, patterning the photo-resist by exposing and developing the photo-resist with a mask which has lines and spaces in which a distance between the lines is smaller than a resolution of an exposure system used and etching the metal layer using the patterned photo-resist as a mask.
Claims30
A method of manufacturing a semiconductor device comprising the steps of:
- providing a substrate;
- forming a layer on the substrate;
- forming a photo-resist on the layer;
- and
- exposing and developing the photo-resist using only a single mask such that the photo-resist has a pattern including a thick portion and a thin portion.
A method of manufacturing a semiconductor device comprising the steps of:
- providing a substrate;
- forming a layer on the substrate;
- forming a photo-resist on the layer;
- and
- performing a single masking step to develop the photo-resist such that the photo-resist has a thick portion and a thin portion.
A method of manufacturing a liquid crystal display comprising the steps of:
- providing a substrate;
- forming a layer on the substrate;
- forming a photo-resist on the layer;
- and
- exposing and developing the photo-resist using only a single mask such that the photo-resist has a pattern including a thick portion and a thin portion.
A method of manufacturing a liquid crystal display comprising the steps of:
- providing a substrate;
- forming a layer on the substrate;
- forming a photo-resist on the layer;
- and
- performing a single masking step to develop the photo-resist such that the photo-resist has a thick portion and a thin portion.
Dependencies are inferred from the claim text.