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OwnerRobert Arthur Lee, Patrick Leech +1inventors
InventorsRobert Arthur Lee, Patrick Leech, Xiaoping Yang
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A three-dimensional microstructure includes a plurality of structure elements, each structure element having a width, a length and a height, wherein a significant proportion of the structure elements have height dimensions which exceed their width and length dimensions. A method of fabricating such a microstructure includes the steps of: forming a mask with a plurality of regions, each region having a predetermined degree of transparency to UV radiation; providing a substrate (5) coated with a thick layer (6) of UV resist material; using UV radiation to irradiate through each of the regions of the mask a corresponding region of the layer of UV resist; and developing the layer of UV resist to remove irradiated regions, wherein the depth of each region is dependent upon the degree of transparency of the corresponding region of the mask.
A three-dimensional optical microstructure including a plurality of microstructure elements, each microstructure element having a width, a length and a height, wherein a significant proportion of the microstructure elements have height dimensions which exceed their width and length dimensions, and wherein the microstructure is a representation of a two-dimensional image composed of grey-scale pixels wherein each pixel in the two-dimensional image is represented by a microstructure element group in the three-dimensional microstructure and the grey-scale value of each pixel is represented by the height of the corresponding microstructure elements.
A three-dimensional optical microstructure including a plurality of microstructure elements, each microstructure element having a width, a length and a height, wherein a significant proportion of the microstructure elements have height dimensions which exceed their width dimensions, and wherein the microstructure is a representation of a two-dimensional image composed of grey-scale tracks, each track being composed of sections, wherein each track section in the two-dimensional image is represented by a microstructure element group in the three-dimensional microstructure and the grey-scale value at any point along each track is represented by the height of the corresponding microstructure elements.
A microstructure according to claim I wherein the microstructure elements have fixed length and width dimensions but varying height dimensions.
A method of fabricating a microstructure including the steps of:
Dependencies are inferred from the claim text.