Patterning methods and systems using reflected interference patterns
AssigneeUniversity of Tennessee Research Foundation
InventorsDaniel J.C. Herr, David Charles Joy
Life of this patent
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Abstract
A method for patterning a layer on a substrate can include projecting coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to provide a holographic projection of a desired image wherein the reflector surface includes information that corresponds to an inverse of the holographic projection of the desired image. The substrate including the layer can be maintained in the path of the reflected radiation so that the holographic projection is projected onto the layer. Related systems are also discussed.
Claims40
A method for patterning a layer on a substrate, the method comprising the steps of:
- projecting coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to provide a holographic projection of a desired image wherein the reflector surface includes information that corresponds to an inverse of the holographic projection of the desired image;
- and
- maintaining the substrate including the layer in the path of the of the reflected radiation so that the holographic projection is projected onto the layer.
A system for patterning a layer on a substrate, the system comprising:
- means for projecting coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to provide a holographic projection of a desired image wherein the reflector surface includes information that corresponds to an inverse of the holographic projection of the desired image;
- and
- means for maintaining the substrate including the layer in the path of the of the reflected radiation so that the holographic projection of the desired image is projected onto the layer.
A system for patterning a layer on a substrate surface, the system comprising:
- a radiation source that is configured to project coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to project a holographic projection of a desired image on the layer so that the holographic image of the desired image is used to pattern the layer.
Dependencies are inferred from the claim text.