High coercivity magnetic recording medium comprising a sputter textured layer
AssigneeSeagate Technology LLC
InventorsXing Song, Ga-Lane Chen, Charles Leu
Life of this patent
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Abstract
Reproducible texturing of magnetic recording media is enhanced by sputtering a buffer layer, such as Ni—P, on a nonmagnetic substrate, prior to sputtering a textured bump layer. A magnetic recording medium comprising a sputter textured metal layer and high coercivity is achieved by employing an underlayer, such as NiAl or FeAl, preferably a composite underlayer containing a chromium or chromium-alloy layer and a NiAl layer, on the sputter textured layer. Advantageously, the buffer layer, underlayer, textured bump layer, magnetic layer and carbon overcoat can be sputter deposited in a single apparatus.
Claims46
A magnetic recording medium, comprising:
- a non-magnetic substrate;
- a sputtered buffer layer on the substrate;
- a sputtered metallic bump layer, comprising a plurality of protrusions, on the buffer layer;
- an underlayer formed on the bump layer;
- and
- a magnetic layer on the underlayer.
A magnetic recording medium, comprising:
- a non-magnetic substrate;
- a sputtered metallic bump layer, comprising a plurality of protrusions, formed on the substrate;
- an underlayer formed on the bump layer;
- and
- a magnetic layer formed on the underlayer, wherein the magnetic recording medium exhibits a coercivity greater than 2500 Oersteads.
A magnetic recording medium, comprising:
- a glass or glass-ceramic substrate;
- a nickel-phosphorous buffer layer on the substrate;
- a sputtered metallic bump layer, comprising a plurality of protrusions, on the buffer layer;
- an underlayer on the bump layer;
- and
- a magnetic layer on the bump layer.
A method of manufacturing a magnetic recording medium, which method comprises:
- sputtering a buffer layer on a non-magnetic substrate;
- sputtering a metallic bump layer, comprising a plurality of protrusions, on the buffer layer;
- sputtering an underlayer on the bump layer;
- and
- sputtering a magnetic layer on the bump layer.
An apparatus manufacturing a magnetic recording medium, which apparatus comprises:
- a load chamber for loading a non-magnetic substrate;
- a sputtering chamber for depositing a buffer layer on the substrate;
- a sputtering chamber for depositing a metallic bump layer, comprising a plurality of protrusions, on the buffer layer;
- a sputtering chamber for depositing an underlayer on the bump layer;
- and
- a sputtering chamber for depositing a magnetic layer on the bump layer.
Dependencies are inferred from the claim text.