Ultrafine particle structure and production method thereof

An ultrafine particle structure comprising;

• a substrate having a main surface;
• and
• a plurality of ultrafine particles disposed continuously on the main surface of the substrate,
• wherein a plurality of the ultrafine particles have diameters in the range of from 2 to 200 nm respectively and are at least partially bonded between adjacent ultrafine particles.

A producing method for producing an ultrafine particle structure comprises the steps of;

• disposing a target material having a slit of desired shape on a substrate;
• irradiating a high energy beam collectively in a slanting direction on an inner wall surface of the slit of the target material to liberate constituent atoms or molecules of the target material;
• and
• forming a plurality of ultrafine particles by sticking on the substrate the constituent atoms or molecules liberated from the target material,
• wherein a plurality of the ultrafine particles are disposed on the substrate along the shape of the slit.

A producing method for producing an ultrafine particle structure comprises the following steps of;

• disposing a target material of a desired slit shape on a substrate;
• irradiating continuously or intermittently, to liberate constituent atoms or molecules from the target material, a high energy beam in a slanting direction to an inner wall surface of the slit of the target material along the shape of the slit;
• and
• forming a plurality of ultrafine particles through sticking of the constituent atoms or molecules liberated from the target material on the substrate, wherein a plurality of the ultrafine particles are disposed continuously on the substrate along the shape of the slit.