Gas friction pump
AssigneePfeiffer Vacuum GmbH
InventorsArmin Conrad, Peter Fahrenbach
Life of this patent
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Abstract
A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.
Claims13
A gas friction pump, comprising a housing having a suction opening connectable with a recipient, and a gas outlet opening;
- a plurality of pumping active rotor and stator components arranged in the housing for delivery of gases and for producing a compression ratio, the rotor and stator components having a diameter larger than a diameter of the suction opening;
- and a modified rotor component located adjacent to the suction opening and having a gas delivery structure, the modified rotor component having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.
A gas friction pump, comprising a housing having a suction opening connectable with a recipient, and a gas outlet opening;
- a plurality of pumping active rotor and stator components arranged in the housing for delivery of gases and for producing a compression ratio, the rotor and stator components having a diameter larger than a diameter of the suction opening;
- and a modified rotor component located adjacent to the suction opening and having a gas delivery structure, the modified rotor component having a radial extent which is smaller than a radial extent of the pumping active rotor and stator components.
Dependencies are inferred from the claim text.