Manufacturing method of a liquid crystal display

Abstract

It is intended to provide a manufacturing method of a liquid crystal display that can reduce the manufacturing cost by decreasing the number of masks. A gate insulating film, a semiconductor film, and a silicon nitride film are laid on a substrate on which a gate bus line is formed, back exposure is performed by using the gate bus line as a mask, and the silicon nitride film is then patterned, whereby a channel protective film is formed along the gate bus line. Two device isolation holes are formed over the gate bus line at two locations that are on both sides of a source electrode and a drain electrode and that are separated from each other in the extending direction of the gate bus line. A thin-film transistor is formed in such a manner that a semiconductor active film is formed by a portion of the semiconductor film that is interposed between the two device isolation holes and is thereby electrically isolated from other pixel regions and that a gate electrode is formed by a portion of the gate bus line that is located between the two device isolation holes.

Dependencies are inferred from the claim text.