Ink jet printing head and method of manufacturing the same

A method of manufacturing an ink jet print head comprising the steps of:

• forming a fluid passage forming substrate including pressure generating chambers being trapezoidal in shape, which are formed by etching a silicon monocrystalline substrate by an anisotropical etching process, each of said pressure generating chambers having first walls, which are vertical to the surface of said silicon monocrystalline substrate and oriented in the orientation of said pressure generating chambers, and second walls which are slanted with respect to the surface of said silicon monocrystalline substrate, said second walls being formed at both ends of each of said pressure generating chambers;
• firmly fastening an elastic plate onto first opening-formed sides of said pressure generating chambers, pressure generating means for expanding and contracting said pressure generating chambers being mounted on the surface of said elastic plate;
• coating the surface of said fluid passage forming substrate, which includes second opening-formed sides of said pressure generating chambers, the opening of each of said first opening-formed sides being smaller than the opening of each of said second opening-formed sides;
• pressing said covering member having nozzle openings each located at the end of each said pressure generating chambers against said fluid passage forming substrate, whereby part of said adhesive flows into each of said pressure generating chambers, to form and harden meniscuses of said adhesive in spaces defined by walls slanted with respect to the surface of said fluid passage forming substrate.

An ink jet print head comprising:

• a fluid passage forming substrate including pressure generating chambers being trapezoidal in shape, which are formed by etching a silicon monocrystalline substrate by an anisotropical etching process, each said pressure generating chamber having first walls, which are vertical to the surface of said silicon monocrystalline substrate and oriented in the orientation of said pressure generating chambers, and second walls which are slanted with respect to the surface of said silicon monocrystalline substrate, said second walls being formed at both ends of each of said pressure generating chambers;
• an elastic plate firmly fastened onto first opening-formed sides of said pressure generating chambers, pressure generating means for expanding and contracting said pressure generating chambers being mounted on the surface of said elastic plate;
• and a covering member having nozzle openings each located at the end of each of said pressure generating chambers and firmly fastened to second opening-formed sides of said pressure generating chambers, the opening of said first opening-formed side being smaller than the opening of said second opening-formed side;
• wherein an enlarged portion is formed in each of said opening-formed sides of each said pressure generating chamber by an anisotropical etching process.

A method of manufacturing an ink jet print head comprising the steps of:

• forming a fluid passage forming substrate including pressure generating chambers being trapezoidal in shape, which are formed by etching a silicon monocrystalline substrate by anisotropical etching process, each of said pressure generating chambers having first walls, which are vertical to the surface of said silicon monocrystalline substrate and oriented in the orientation of said pressure generating chambers, and second walls which are slanted with respect to the surface of said silicon monocrystalline substrate, said second walls being formed at both ends of each of said pressure generating chambers;
• firmly fastening an elastic plate firmly onto first opening-formed sides of said pressure generating chambers, pressure generating means for expanding and contracting said pressure generating chambers being mounted on the surface of said elastic plate;
• forming an enlarged portion by etching a second opening-formed side of each of said pressure generating chambers toward the inner part of each of said pressure generating chambers by surface anisotropical etching process;
• and
• firmly fastening a covering member having nozzle openings each located at the end of each of said pressure generating chambers.