Ink jet recording head, ink jet recording device and head manufacturing method

An ink jet recording head which is formed by laminating a first substrate and a second substrate and inside of which an ink jetting mechanism is mounted, comprising:

• a nozzle forming plane of the first substrate having a nozzle for jetting ink;
• a side plane continuing to the nozzle forming plane, the side plane defining a cut-out portion leaving a region continuing to the nozzle forming plane;
• and
• an electric signal input-output terminal for electrically connecting to an external device, the terminal being formed on the second substrate at a face joining to the first substrate, wherein
• the electric signal input-output terminal is exposed to the outside by forming the cut-out portion.

A method of manufacturing an ink jet recording head in which plural ink jet recording heads are simultaneously manufactured using a wafer, the method comprising:

• forming a through-hole together with a nozzle in a first area of a first wafer equivalent to a chip;
• joining a second wafer, provided with an electric signal input-output terminal in a second area equivalent to a chip, with the first wafer, and exposing the electric signal input-output terminal to the outside from the through-hole;
• and
• dicing and isolating a joined body composed of the first wafer and the second wafer in units of chip.