Electronic component having built-in inductor

A method of making an electronic component having a built-in inductor comprising:

• forming a first pattern by photolithography on a first substrate, said first pattern comprising a conductive deposited film;
• forming a second pattern by photolithography on a second substrate, said second pattern being formed of a ferromagnetic metal deposited film made of a material other than a ferrite;
• forming a third pattern by photolithography on a third substrate, said third pattern being formed of a ferromagnetic metal deposited film made of a material other than a ferrite;
• transferring the first and second patterns from the first and second substrates to a first ceramic green sheets;
• transferring the third pattern from the third substrate to a second and third ceramic green sheets;
• laminating the first, second and third ceramic green sheet having transferred first, second and third patterns thereon with at least one additional ceramic green sheets such that said first, second and third patterns are covered by at least one of the ceramic green sheets;
• and
• firing the laminate to obtain a ceramic multilayer substrate having the first, second and third patterns embedded therein.