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US 2001/0040461 A1Published application
Wafer probe station having environment control enclosure
AssigneeCascade Microtech, Inc.
InventorsWarren K. Harwood, Paul A. Tervo, Martin J. Koxxy
Life of this patent
Estimating the term…
Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Claims22
A probe station comprising:
- (a) a surface for holding a test device for contact by a probe;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe, independently of each other, toward or away from the other along an axis of approach;
- and
- (c) an environment control enclosure substantially surrounding said surface so as to limit fluid communication between the interior and exterior of said enclosure to a substantially constant degree despite movement by said positioning mechanisms of either one of said surface and probe, respectively, toward or away from the other along said axis of approach, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe.
1 more element
A probe station comprising:
- (a) a surface for holding a test device for contact by a probe;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe, independently of each other, with respect to each other;
- and
- (c) an environment control enclosure substantially surrounding said surface so as to limit fluid communication between the interior and exterior of said enclosure to a substantially constant degree despite movement by said positioning mechanisms of either one of said surface and probe with respect to each other, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe;
- (d) said surface having a supporting area for said test device bounded by a periphery, and said enclosure comprising a side portion substantially surrounding said periphery, said surface being movable toward and away from said side portion over a range of motion, relative to said side portion, which is coextensive with at least a major portion of said supporting area of said surface.
2 more elements
A probe station comprising:
- (a) a surface for holding a test device for contact by a probe, said surface having a supporting area for said test device bounded by a periphery;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe independently of the other in relation to the other;
- (c) an environment control enclosure, said enclosure having an upper portion extending over said surface, and a side portion substantially surrounding said periphery and having a top adjacent to said upper portion, said surface being movable toward and away from said upper portion independently of any movement by said top of said side portion and movable sideways with respect to said upper portion, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe.
A probe station comprising:
- (a) a surface for holding a test device for contact by a probe, said surface having a supporting area for said test device bounded by a periphery;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe independently of the other in relation to the other;
- (c) an environment control enclosure, said enclosure having an upper portion extending over said surface, and a side portion substantially surrounding said periphery and having a top adjacent to said upper portion, said surface being movable toward and away from said upper portion independently of any relative movement between said top of said side portion and said upper portion, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe;
- (d) said surface being movable toward and away from said side portion over a range of motion, relative to said side portion, which is coextensive with at least a major portion of said supporting area of said surface.
1 more element
A probe station comprising:
- (a) a surface extending in a lateral direction for holding a test device for contact by a probe;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe independently of the other in relation to the other;
- (c) an environment control enclosure, said enclosure having an upper portion extending over said surface substantially in said lateral direction, and a side portion substantially surrounding said surface having a top adjacent to said upper portion and extending generally toward said upper portion, said surface being movable toward and away from said upper portion independently of any movement by said top of said side portion and movable in said lateral direction with respect to said upper portion, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe;
- (d) said top of said side portion being substantially immovable operably relative to said upper portion in said lateral direction.
1 more element
A probe station comprising:
- (a) a surface extending in a lateral direction for holding a test device for contact by a probe;
- (b) a pair of positioning mechanisms each operable to selectively move a corresponding one of said surface and said probe, independently of each other, toward or away from the other along an axis of approach;
- and
- (c) an environment control enclosure substantially surrounding said surface so as to limit fluid communication between the interior and exterior of said enclosure to a substantially constant degree despite movement by said positioning mechanisms of either one of said surface and probe, respectively, toward or away from the other along said axis of approach, said enclosure having an upper portion extending over said surface substantially in said lateral direction and a side portion, substantially surrounding said surface laterally, having a top adjacent to said upper portion and extending generally toward said upper portion, said surface being movable by one of said positioning mechanisms in said lateral direction with respect to said top of said side portion, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe.
1 more element
A probe station comprising:
- (a) a surface extending in a lateral direction for holding a test device for contact by a probe;
- (b) respective positioning mechanisms operable to selectively move a corresponding one of said surface and said probe, independently of each other, in relation to the other in said lateral direction;
- (c) an environment control enclosure, substantially surrounding said surface so as to limit fluid communication between the interior and exterior of said enclosure to a substantially constant degree despite movement by said positioning mechanisms of said surface and probe in said lateral direction, each of said positioning mechanisms being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe;
- and
- (d) said enclosure having an opening for providing access to said surface, for substituting different test devices on said surface, and a door for selectively closing said opening.
2 more elements
A probe station comprising:
- (a) a surface extending in a lateral direction for holding a test device for contact by a probe;
- (b) a pair of positioning mechanisms operable to selectively move a corresponding one of said surface and said probe independently of each other, in relation to each other;
- and
- (c) an environment control enclosure substantially surrounding said surface so as to limit fluid communication between the interior and exterior of said enclosure to a substantially constant degree despite movement by said positioning mechanisms of either one of said surface and said probe, said enclosure having an upper portion extending over said surface substantially in said lateral direction and a side portion, substantially surrounding said surface laterally, having a top adjacent to said upper portion and extending generally toward said upper portion, said surface being movable by one of said positioning mechanisms in said lateral direction with respect to said top of said side portion, said pair of positioning mechanisms each being located at least partially outside of said enclosure so that mechanical movement of each of said positioning mechanisms outside of said enclosure causes proportional mechanical movement of the corresponding one of said surface and said probe.
1 more element
A probe station comprising:
- (a) a surface extending in a lateral direction for holding a test device for contact by a probe;
- (b) respective positioning mechanisms operable to selectively move a corresponding one of said surface and said probe, independently of each other, in relation to each other in said lateral direction;
- (c) an environment control enclosure substantially surrounding said surface, each of said positioning mechanisms being located at least partially outside of said enclosure for transferring movement mechanically to the corresponding one of said surface and said probe;
- and
- (d) said enclosure having an opening for providing access to said surface, for substituting different test devices on said surface, and a door for selectively closing said opening.
2 more elements
Dependencies are inferred from the claim text.