Biased rotatable combdrive sensor methods
OwnerBehrang Behin, Satinderpall Pannuinventors
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Abstract
A method for rotating a combdriven device uses application of bias force to controllably rotate the device about one or two axis in response to position measurements of the rotating element. The present invention can be employed with prior-art staggered combdrives, single layer self-aligned combdriven devices, and in a broad range of applications in optical telecommunication switching, video, biomedical, inertial sensors, and in storage magnetic disk drives.
Claims9
A method of operating a rotating comb-drive position sensor, comprising:
- a) providing a plurality of first comb fingers and a plurality of second comb fingers, wherein said second comb fingers are interdigitated with said first comb fingers in an engagement;
- b) mechanically coupling a rotating element to said first comb fingers;
- c) coupling a biasing element to said rotating element;
- d) exerting a biasing force with said biasing element, thereby causing said first comb fingers along with said rotating element to undergo a controlled angular displacement from said engagement about said axis;
- and
- e) monitoring a position of said rotating element.
The method of step 8 wherein the biasing element operates on magnetic principals.
The method of step 8 wherein the biasing element operates on electrostatic principals.
Dependencies are inferred from the claim text.