Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method
AssigneeFitzpatrick Cella Harper & Scinto
InventorsTAKEHIKO MAYAMA, YUKIO TAKABAYASHI, SHINJI WAKUI
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Abstract
An anti-vibration apparatus for actively damping an object vibrations by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.
Claims44
An anti-vibration apparatus for actively damping an object vibrations by generating control forces to reduce the vibrations, comprising:
- a first actuator for generating a first control force;
- and
- a second actuator for generating a second control force, said second actuator using a driving principle different from that of said first actuator,
- wherein said first actuator generates forces in vertical and horizontal directions, and said second actuator generates a force at least in one of the vertical and horizontal directions.
An exposure apparatus comprising anti-vibrationmeans using said anti-vibration apparatus defined in claims 135.
An anti-vibration method comprising the steps of:
- detecting a displacement or vibration of a damped/supported object, extracting signals representing motion modes of translation and rotation from the detection values, and performing compensation operation on the basis of the signals;
- and
- controlling, based on the said compensated signals, at least one of a first actuator for generating forces in vertical and horizontal directions and a second actuator which generates a force in at least one of the vertical and horizontal directions and is driven on a driving principle different from a driving principle of said first actuator.
An anti-vibration method comprising the steps of:
- performing feedforward compensation operation on the basis of a state of a device mounted on an anti-vibration apparatus or a signal from the device;
- and
- controlling, based on the compensated signals, at least one of a first actuator for generating forces in vertical and horizontal directions and a second actuator which generates a force in at least one of the vertical and horizontal directions and is driven on a driving principle different from a driving principle of said first actuator.
Dependencies are inferred from the claim text.