Microbench and producing method therefor, and optical semiconductor module using same

A microbench producing method comprising:

• providing a baked ceramics substrate;
• placing a die on the baked ceramics substrate, the die having configurations, wherein at least one shapes selected from a group of a groove for mounting an optical fiber, a semiconductor device mounting portion and an alignment mark is inverted;
• and
• re-baking the baked ceramics substrate at 1,400° C. or higher.

A microbench producing method comprising:

• preparing a ceramics sheet in which holes have been made in an optical fiber mounting portion and another ceramics sheet in which there are no holes;
• baking both ceramics sheets placed one on top of the other to prepare a ceramics having a groove;
• metallizing the surface thereof to form a metalic layer;
• inserting a metal chip into either said groove or a portion which will serve as a semiconductor device mounting portion, or both;
• and
• heating at a temperature of 150° C. or higher, while at the same time impressing the ceramics, so that an optical fiber mounting portion, a semiconductor mounting portion, and an alignment mark are formed in the ceramics.